DETERMINATION OF GEOMETRICAL THICKNESS OR REFRACTIVE INDEX OF MICROOBJECTS USING A LASER INTERFEROMETER WITH SHARPLY FOCUSED BEAMS
Artem A. Gres1, Dmitry V. Lyakin2, Vladimir V. Derbov1; 1Saratov State University, Saratov, Russia; 2Institute of Precision Mechanics and Control, Saratov Federal Scientific Centre of the RAS, Saratov, Russia
Abstract
A method has been developed for determining either the refractive index or the geometrical thickness of a single-layer microobject using a laser interferometer with sharply focused beams at different numerical aperture values of the probing beam. The method demonstrates an accuracy of 0.1–0.2 μm in geometrical thickness determination when the refractive index is known. Additionally, it allows for the determination of the refractive index with precision up to the third decimal place when the geometrical thickness of the object is known.
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Artem A. Gres
Saratov State University
Russia
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