Investigation of the nonlinear photothermal effect in the process of laser ablation of oxide films with different thermal conductivity coefficients
Sergey D. Poletayev 1; 1Image Processing Systems Institute, NRC "Kurchatov Institute"
Dmitry A. Savelyev 1,2; 1Image Processing Systems Institute, NRC "Kurchatov Institute" Samara, Russia, 2Samara National Research University, Samara, Russia.
Abstract
The paper investigates the nonlinear photothermal effect that occurs during local laser ablation of metal oxide films with different thermal conductivity.It is shown that the track width decreases monotonously with a change in the thermal conductivity coefficient in the range from 25 to 1 W/(m∙K). It was found that a moderate decrease in the thermal conductivity of the film does not lead to a significant decrease in the track width. The conclusion is made about the combined effect of the thermal conductivity coefficient and the thermal acceleration factor on the minimum track width, which introduces additional nonlinearity into the heating process of the oxide film.
Speaker
Sergey Poletaev
Image Processing Systems Institute, NRC "Kurchatov Institute"
Russia
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