Microfabrication of 2D slow-wave structures for vacuum microelectronic devices using laser micro-processing
Nozhkin D.1,2, Starodubov A.1,2, Torgashov R.1,2, Galushka V.1,2, Serdobintsev A.1, Kozhevnikov I.1, Ryskin N.1,2; 1Saratov State University, Saratov, Russia; 2Saratov Branch, V.A. Kotelnikov Institute of Radio Engineering and Electronics RAS, Saratov, Russia
Abstract
Currently, vacuum microelectronic devices and their main components for operation in millimeter and sub-millimeter wavelength bands are actively developed and studied by researchers and engineers. The mentioned devices are widely used in various fields of modern science, including wireless high-data-rate communication systems, medicine, and security systems (non-destructive evaluation). But at the same time, there is a problem with the fabrication of such miniaturized devices and their micro-sized elements. As the wavelength declines, the size of the key components shrinks in accordance with the wavelength. In this regard, nowadays there are several technologies that allow microfabrication of tiny elements for vacuum microelectronic devices: UV-LIGA, 3D printing, deep reactive etching, CNC milling, and laser micro-processing.
In this work, the method of laser micro-processing based on the effect of laser ablation, specifically the process of removing a substance from the surface of a material by laser pulses, was utilized. This work is devoted to the technological route of creating 2D slow-wave structures, which are the key components for vacuum microelectronic devices. The results of the fabrication of several types of slow-wave structures will be presented at the conference. The first type is a slow-wave structure in the form of a meander line located on a dielectric substrate, while another is an all-metal plane slow-wave structure made from oxygen-free copper foil by precise laser cutting. The results of morphology studies as well as cold measurements in the millimeter bands for fabricated slow-wave structures will also be presented and considered in detail.
This work was supported by the Russian Science Foundation (project No. 22-12-00181).
Speaker
Nozhkin Dmitrii
SSU
Russia
Discussion
Ask question
