Application of the RGB data obtained by the bright-field optical microscopy for the efficient control of the planar surface cleanness of thin films and for the estimation of their thickness
Anton A. Kozyrev, 1,2,3, Oksana A. Lapshina, 1, Julia A. Eliseeva, 1
1. INJECT RME LLC, Saratov, Russia
2. National Research Nuclear University MEPhI, Moscow, Russia
3. Saratov State University, Saratov, Russia
Abstract
It is shown that the RGB data of bright-field optical microscopy can be used for the operative control of the planar surface cleanliness of thin films and for the estimation of their thickness. This method may be very useful for application in the planar process technology of semiconductor devices production, especially for laser diodes manufacturing. It is demonstrated that the thickness of a film on a planar substrate surface can be obtained from RGB data measured by means of a photosensor based on a Bayer array with known spectral response. We present an example how to use this method to detect dielectric films from inorganic materials such as SiO2 and organic materials such as photoresist and other polymer on a GaAs semiconductor wafer with and without gold plating. It is shown that the RGB data can be used for operative estimation of film thickness both in the case of decreasing thickness when a film is etched in plasma, and in the case of increasing thickness during film deposition.
Speaker
Kozyrev Anton
INJECT RME LLC
Russian
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