High-precision mirror diffractive optical elements manufacturing method for hyperspectral equipment
Sergey A. Fomchenkov
Image Processing Systems Institute of the RAS - Branch of the FSRC "Crystallography and Photonics" RAS, Samara, Russia
Abstract
In this paper, we propose and study a new method for creating mirror diffractive optical elements (DOEs) with high accuracy. The proposed approach differs from the existing ones in improved resolution in the lateral plane and increased depth accuracy in the manufacture of elements. These advantages can be achieved by abandoning the technological stage with plasma-chemical etching. Alternatively, several successive spraying steps are used. As a result, the surface of the element has a minimum roughness, which positively affects the quality of its work. The paper demonstrates experimental studies of the method and the results of the work of the elements obtained using the proposed approach. The images obtained with the help of hyperspectral cameras based on fabricated DOEs are shown.
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Sergey Fomchenkov
IPSI RAS
Russia
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