Laser micromachining of the thin films made from the molybdenum-copper alloys
D.A. Nozhkin1, A.A. Serdobintsev1, I.O. Kozhevnikov1, V.V. Galushka1,2, A.M. Zakharevich1, A.V. Starodubov1,2
1Saratov State University, Saratov
2Saratov branch of IRE (Institute of Radio Engineering and Electronics) RAS, Saratov
Abstract
Due to the growth of research aimed at the study and development of devices or elements in the millimeter and submillimeter range, there is a challenge in the fabrication of devices or elements. This paper presents one of the fabrication methods - nanosecond laser ablation.The goal of this work is to form planar conductive structures of copper-molybdenum alloys on a solid dielectric substrate using nanosecond laser ablation. The advantages of copper-molybdenum alloys lie in the combination of properties such as low thermal expansion coefficient with high thermal conductivity and electrical conductivity.The obtained result showed that the adhesion of the coating itself to the substrate is insufficient. In the future, work will be carried out to improve the adhesion layer and the work will be supplemented.
Speaker
Nozhkin Dmitrii Andreevich
Saratov state university
Russia
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