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Nanostructured layers of zirconium and tantalum formed on titanium by induction PVD

Fomina Marina Alekseevna - Yuri Gagarin State Technical University of Saratov;
Fedoseev Maksim Evgenyevich - Yuri Gagarin State Technical University of Saratov, Russia;
Zakharevich Andrey Mikhailovich - Saratov State University, Russia;
Fomin Aleksander Aleksandrovich - Yuri Gagarin State Technical University of Saratov, Russia

Abstract

In this work, we considered the possibility of using induction PVD to form zirconium and tantalum nanostructured layers on titanium. Investigations made it possible to establish that during vacuum deposition metal oxide layers were formed with tantalum or zirconium contents up to 0.15 at.%. Tantalum layers were characterized by particle sizes up to 50 nm, and zirconium layers up to 100 nm.

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Fomina Marina Alekseevna
Yuri Gagarin State Technical University of Saratov
Russia

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