Nanostructured layers of zirconium and tantalum formed on titanium by induction PVD
In this work, we considered the possibility of using induction PVD to form zirconium and tantalum nanostructured layers on titanium. Investigations made it possible to establish that during vacuum deposition metal oxide layers were formed with tantalum or zirconium contents up to 0.15 at.%. Tantalum layers were characterized by particle sizes up to 50 nm, and zirconium layers up to 100 nm.
Fomina Marina Alekseevna
Yuri Gagarin State Technical University of Saratov
File with report