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Full-size mock-ups of a meander-line slow-wave structure made by laser micromachining for a miniaturized millimeter-wave TWT

Dmitrii A. Nozhkin,2 Roman A. Torgashov,1,2 Alexey A. Serdobintsev,2 Ivan O. Kozhevnikov,2 Victor V. Galushka,1,2 Anton A. Kozyrev,2,3, Andrey V. Starodubov,1,2 Nikita M. Ryskin,1,2
Saratov Branch, Kotelnikov Institute of Radio Engineering and Electronics RAS, 38 Zelenaya st., 410019 Saratov, Russia 1
Saratov State University, 83 Astrakhanskaya st., 410004 Saratov, Russia 2
National Research Nuclear University MEPHI, Kashirskoe shosse, 3, 115409, Moscow, Russia 3

Abstract

Currently, there is a considerable interest in research aimed at the study and development of electronic devices and their basic elements for operation in the millimeter and submillimeter wavelength ranges, such as antennas, waveguides, transmission lines, etc. The size of the primary parts of electronic devices shrink correspondingly as the working wavelength moves towards the millimeter region. This feature makes it difficult to quickly and effectively fabricate such tiny structures. In our prior work, we employed a pulsed laser ablation approach to microfabricate the key components of vacuum microelectronics devices such as a slow-wave system (SWS) on a dielectric substrate. This study expands on a technology that uses pulsed laser ablation to microfabricate full-size mock-ups of SWS, including signal input and output elements, for use in vacuum microelectronic devices. A full-size design of a microstrip meander-line SWS (MML SWS) on a dielectric substrate for a miniature millimeter-band traveling-wave tube was obtained based on the analysis of detailed numerical results using specialized software such as Comsol Multiphysics and CST Microwave Studio. The most efficient laser micromachining regimes are identified, and one of the successful technology pathways is presented. We can conclude that the experimentally acquired results and the original numerical model have a good qualitative and quantitative correspondence based on the first findings of the morphological investigation utilizing optical and scanning electron microscopy. As a next step, it is planned to measure the electromagnetic characteristics of the microfabricated mock-ups of MML SWSs in the millimeter wavelength range using a special manufactured waveguide test assembly.
This work was supported by a grant of Russian Foundation for Basic Research (No. 20-57-12001)

Speaker

Dmitrii Nozhkin
Saratov State University
Russian Federation

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